European Physical Society Plasma Physics Conference 2026

Name: European Physical Society Plasma Physics Conference 2026
Start: 2026-06-29T08:00:00+01:00
End: 2026-07-03T18:00:00+01:00
Location: EICC, Edinburgh

29 June 2026 to 3 July 2026

EICC, Edinburgh

Europe/London timezone

Support Contact

EPS2026@ukaea.uk

Details for Hakseung Lee

Title: Mr

Affiliation: Sungkyunkwan University, Suwon, Republic of Korea

Effect of H₂O addition on fluorocarbon layer formation and low-temperature etching in CₓFᵧ plasmas

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European Physical Society Plasma Physics Conference 2026

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Author in the following contribution