Description
A spatially averaged global model was developed for inductively coupled carbonyl sulfide (COS) plasma. The model simultaneously calculates wall coverages, electron temperature, and the densities of neutral and charged species. The simulation results were validated through comparison with experimental data reported in the literature and obtained using quadrupole mass spectrometry (QMS). The dominant reaction pathways for COS dissociation and CO formation were analyzed.
Author
Sang-Young Chung
(Korea Institute of Fusion Energy)
Co-authors
Deuk-Chul Kwon
(Korea Institute of Fusion Energy)
Dr
Yeong Geun Yook
(Korea Institute of Fusion Energy)